Evidence map›Paper›PMID 36903030›Full record

ArticleMaterials (Basel, Switzerland)2023

Si-Cr Nano-Alloys Fabricated by Direct Femtosecond Laser Writing.

Jovan Maksimovic, Haoran Mu, Molong Han, Daniel Smith, Tomas Katkus, Vijayakumar Anand, Yoshiaki Nishijima, Soon Hock Ng, Saulius Juodkazis

Full text read
In one paragraph

Article in Materials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

9 authors.

Jovan MaksimovicOptical Sciences Centre and Australian Research Council (ARC) Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Hawthorn, VIC 3122, Australia.
Haoran MuOptical Sciences Centre and Australian Research Council (ARC) Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Hawthorn, VIC 3122, Australia.
Molong HanOptical Sciences Centre and Australian Research Council (ARC) Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Hawthorn, VIC 3122, Australia.
Daniel SmithOptical Sciences Centre and Australian Research Council (ARC) Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Hawthorn, VIC 3122, Australia.ORCID 0000-0002-2543-5209
Tomas KatkusOptical Sciences Centre and Australian Research Council (ARC) Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Hawthorn, VIC 3122, Australia.
Vijayakumar AnandInstitute of Physics, University of Tartu, W. Ostwaldi Str. 1, 50411 Tartu, Estonia.ORCID 0000-0001-8867-1949
Yoshiaki NishijimaDepartment of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan.
Soon Hock NgOptical Sciences Centre and Australian Research Council (ARC) Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Hawthorn, VIC 3122, Australia.ORCID 0000-0002-9164-3399
Saulius JuodkazisOptical Sciences Centre and Australian Research Council (ARC) Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Hawthorn, VIC 3122, Australia.ORCID 0000-0003-3542-3874

Funding

Australian Research Council DP190103284Australian Research Council LP190100505
6 · The paper itself

Abstract

Ultra-short 230 fs laser pulses of 515 nm wavelength were tightly focused into 700 nm focal spots and utilised in opening ∼400 nm nano-holes in a Cr etch mask that was tens-of-nm thick. The ablation threshold was found to be 2.3 nJ/pulse, double that of plain silicon. Nano-holes irradiated with pulse energies below this threshold produced nano-disks, while higher energies produced nano-rings. Both these structures were not removed by either Cr or Si etch solutions. Subtle sub-1 nJ pulse energy control was harnessed to pattern large surface areas with controlled nano-alloying of Si and Cr. This work demonstrates vacuum-free large area patterning of nanolayers by alloying them at distinct locations with sub-diffraction resolution. Such metal masks with nano-hole opening can be used for formation of random patterns of nano-needles with sub-100 nm separation when applied to dry etching of Si.

Indexed as

nano-alloynanoscaleSi-CrSi nano-needlessub-100 nm

Identifiers

PMID36903030
PMCPMC10004396

What OpenQuestion holds

Textfull text, public
LicenceCC BY
measurements read17
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.