Evidence map›Paper›PMID 36902894›Full record

ArticleMaterials (Basel, Switzerland)2023

Doping Engineering for Optimizing Piezoelectric and Elastic Performance of AlN.

Xi Yu, Lei Zhu, Xin Li, Jia Zhao, Tingjun Wu, Wenjie Yu, Weimin Li

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PubMed Full text at PMC Publisher
In one paragraph

Article in Materials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Xi YuSchool of Microelectronics, Shanghai University, Shanghai 201899, China.
Lei ZhuState Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Xin LiShanghai Institute of IC Materials Co., Ltd., Shanghai 201899, China.
Jia ZhaoState Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Tingjun WuState Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Wenjie YuState Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Weimin LiSchool of Microelectronics, Shanghai University, Shanghai 201899, China.ORCID 0000-0002-8181-6620

Funding

Project supported by Shanghai Technology Innovation Action Plan 2020-Integrated Circuit Technology Support Program Project No. 20DZ1100603
6 · The paper itself

Abstract

The piezoelectric and elastic properties are critical for the performance of AlN-based 5G RF filters. The improvement of the piezoelectric response in AlN is often accompanied by lattice softening, which compromises the elastic modulus and sound velocities. Optimizing both the piezoelectric and elastic properties simultaneously is both challenging and practically desirable. In this work, 117 X

Indexed as

aluminum nitrideelastic modulusfirst-principles calculationhigh-throughputpiezoelectric coefficient

Identifiers

PMID36902894
PMCPMC10004460

What OpenQuestion holds

Textfull text, public
LicenceCC BY
measurements read27
table measurements read6
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.