ArticleMicrosystems & nanoengineering2023
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement.
Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 15 papers.
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Who cites it
15 citing papers in PubMed, 66 citations in OpenAlex.
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- Engineering Polymorphic Phase Boundary in Aerosol-Deposited Ba(ZrNanomaterials (Basel, Switzerland) · 2026Article
- Sensilla Trichoidea-Inspired, High-Temperature, and Omnidirectional Vibration Perception Based on Monolayer Graphene.Nano-micro letters · 2026Article
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- The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process.Micromachines · 2025Article
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- Piezo-VFETs: Vacuum Field Emission Transistors Controlled by Piezoelectric MEMS Sensors as an Artificial Mechanoreceptor with High Sensitivity and Low Power Consumption.Sensors (Basel, Switzerland) · 2024Article
- Polymeric piezoelectric accelerometers with high sensitivity, broad bandwidth, and low noise density for organic electronics and wearable microsystems.Microsystems & nanoengineering · 2024Article
- GPS-Based Network Synchronization of Wireless Sensors for Extracting Propagation of Disturbance on Structural Systems.Sensors (Basel, Switzerland) · 2023Article
- Electric-Force Conversion Performance of Si-Based LiNbOMicromachines · 2023Article
- Influence of Smart Sensors on Structural Health Monitoring Systems and Future Asset Management Practices.Sensors (Basel, Switzerland) · 2023Review
- Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror.Micromachines · 2023Article
- A High-Sensitivity MEMS Accelerometer Using a ScMicromachines · 2023Article
- A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach.Microsystems & nanoengineering · 2023Article
Corrections and comments
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Authors and funding
5 authors at 2 institutions in 2 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Potentially applied in low-noise applications such as structural health monitoring (SHM), a 1-axis piezoelectric MEMS accelerometer based on aerosol deposition is designed, fabricated, simulated, and measured in this study. It is a cantilever beam structure with a tip proof mass and PZT sensing layer. To figure out whether the design is suitable for SHM, working bandwidth and noise level are obtained via simulation. For the first time, we use aerosol deposition method to deposit thick PZT film during the fabrication process to achieve high sensitivity. In performance measurement, we obtain the charge sensitivity, natural frequency, working bandwidth and noise equivalent acceleration of 22.74 pC/g, 867.4 Hz, 10-200 Hz (within ±5% deviation) and 5.6
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