Boosting the Electrostatic MEMS Converter Output Power by Applying Three Effective Performance-Enhancing Techniques.

Mona S Salem, Abdelhalim Zekry, Mohamed Abouelatta, Ahmed Shaker, Marwa S Salem, Christian Gontrand, Ahmed Saeed

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Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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2 · The registry

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4 · The record

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5 · Who and what money

Authors and funding

7 authors.

Mona S SalemElectronics and Communications Engineering Department, Faculty of Engineering, Ain Shams University (ASU), Cairo 11566, Egypt.

Abdelhalim ZekryElectronics and Communications Engineering Department, Faculty of Engineering, Ain Shams University (ASU), Cairo 11566, Egypt.ORCID 0000-0002-8752-9534

Mohamed AbouelattaElectronics and Communications Engineering Department, Faculty of Engineering, Ain Shams University (ASU), Cairo 11566, Egypt.ORCID 0000-0002-8035-9915

Ahmed ShakerPhysics and Mathematics Engineering Department, Faculty of Engineering, Ain Shams University (ASU), Cairo 11566, Egypt.ORCID 0000-0001-6602-7343

Marwa S SalemDepartment of Computer Engineering, Computer Science and Engineering College, University of Ha'il, Ha'il 55211, Saudi Arabia.

Christian GontrandNational Institute of Applied Sciences of Lyon (INSA Lyon), 69621 Lyon, France.

Ahmed SaeedElectrical Engineering Department, Faculty of Engineering and Technology, Future University in Egypt, New Cairo 11835, Egypt.ORCID 0000-0003-1326-6791

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

This current study aims to enhance the electrostatic MEMS converter performance mainly by boosting its output power. Three different techniques are applied to accomplish such performance enhancement. Firstly, the power is boosted by scaling up the technology of the converter CMOS accompanied circuit, the power conditioning, and power controlling circuits, from 0.35 µm to 0.6 µm CMOS technology. As the converter area is in the range of mm

Indexed as

boosting the output powerCOMSOL Multiphysics 5.4MEMS converterperformance enhancementvibration

Identifiers

PMID36838185

DOI10.3390/mi14020485

PMCPMC9964943

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LicenceCC BY

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.