Enhanced Wettability, Hardness, and Tunable Optical Properties of SiC

Veronica S Sulyaeva, Alexey N Kolodin, Maxim N Khomyakov, Alexander K Kozhevnikov, Marina L Kosinova

Open access · goldAbstract read

In one paragraph

Article in Materials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

1.1field-weighted citation impact, top 28% of its field

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed, 11 citations in OpenAlex.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors at 2 institutions in 1 country.

Veronica S SulyaevaNikolaev Institute of Inorganic Chemistry SB RAS, 3, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia.ORCID 0000-0001-6940-057X

Alexey N KolodinNikolaev Institute of Inorganic Chemistry SB RAS, 3, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia.

Maxim N KhomyakovInstitute of Laser Physics SB RAS, 15B, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia.ORCID 0000-0001-8095-2092

Alexander K KozhevnikovNikolaev Institute of Inorganic Chemistry SB RAS, 3, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia.

Marina L KosinovaNikolaev Institute of Inorganic Chemistry SB RAS, 3, Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia.ORCID 0000-0002-3517-3484

Siberian Branch of the Russian Academy of Sciences · RUInstitute of Laser Physics · RU

Funding

Ministry of Science and Higher Education of the Russian Federation 121031700314-5

6 · The paper itself

Abstract

Silicon carbonitride films were deposited on Si (100), Ge (111), and fused silica substrates through the reactive magnetron sputtering of a SiC target in an argon-nitrogen mixture. The deposition was carried out at room temperature and 300 °C and at an RF target power of 50-150 W. An increase in the nitrogen flow rate leads to the formation of bonds between silicon and carbon atoms and nitrogen atoms and to the formation of SiC

Indexed as

film aginghydrophilic filmsmagnetron sputteringmechanical propertiessilicon carbonitride filmstunable optical properties

Identifiers

PMID36837106

DOI10.3390/ma16041467

PMCPMC9961253

OpenAlexW4319983888

What OpenQuestion holds

Textmetadata

LicenceCC BY

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.