ArticleChemistry of materials : a publication of the American Chemical Society2023
Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO
Article in Chemistry of materials : a publication of the American Chemical Society, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
The surface chemistry of the initial growth during the first or first few precursor cycles in atomic layer deposition is decisive for how the growth proceeds later on and thus for the quality of the thin films grown. Yet, although general schemes of the surface chemistry of atomic layer deposition have been developed for many processes and precursors, in many cases, knowledge of this surface chemistry remains far from complete. For the particular case of HfO
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