Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer.

Tao Li, Le Zhang, Wenping Geng, Jian He, Yongkang Rao, Jiabing Huo, Kunxian Yan, Xiujian Chou

Abstract read

In one paragraph

Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Tao LiScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Le ZhangScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Wenping GengScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.ORCID 0000-0002-6324-6193

Jian HeScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Yongkang RaoScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Jiabing HuoScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Kunxian YanScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Xiujian ChouScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Funding

Fundamental Research Program of Shanxi Province 20210302123059Fundamental Research Program of Shanxi Province 20210302124610National Natural Science Foundation of China 51975542National Natural Science Foundation of China 52175554National Natural Science Foundation of China 52205608National Natural Science Foundation of China 62001431National Natural Science Foundation of China 62171414National Natural Science Foundation of China 62171415Research Project Supported by Shanxi Scholarship Council of China HGKY2019066Young Academic Leaders of North University of China 11045501

6 · The paper itself

Abstract

Due to their excellent capabilities to generate and sense ultrasound signals in an efficient and well-controlled way at the microscale, piezoelectric micromechanical ultrasonic transducers (PMUTs) are being widely used in specific systems, such as medical imaging, biometric identification, and acoustic wireless communication systems. The ongoing demand for high-performance and adjustable PMUTs has inspired the idea of manipulating PMUTs by voltage. Here, PMUTs based on AlN thin films protected by a SiO

Indexed as

aluminum nitride (AlN)DC biasfrequency characteristicsmicroelectromechanical system (MEMS) fabricationpiezoelectric micromachined ultrasonic transducer (PMUT)

Identifiers

PMID36677270

DOI10.3390/mi14010210

PMCPMC9862720

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.