ArticleMicromachines2022
Thin Film Piezoelectric Nanogenerator Based on (100)-Oriented Nanocrystalline AlN Grown by Pulsed Laser Deposition at Room Temperature.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed.
- Broad Beam Plasma Enhanced Low-Temperature Growth of Oriented Aluminum Nitride Thin Films.ACS applied materials & interfaces · 2025Article
- An Ion Discharge-Driven Thruster Based on a Lithium Niobate Piezoelectric Transformer.Micromachines · 2025Article
- Research on Performance Enhancement, Output Regulation, and the Applications of Nanogenerators.Micromachines · 2025Article
- Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine.Sensors (Basel, Switzerland) · 2024Review
- Leveraging Ferroelectret Nanogenerators for Acoustic Applications.Micromachines · 2023Review
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Authors and funding
3 authors.
Funding
Abstract
In wearable or implantable biomedical devices that typically rely on battery power for diagnostics or operation, the development of flexible piezoelectric nanogenerators (NGs) that enable mechanical-to-electrical energy harvesting is finding promising applications. Here, we present the construction of a flexible piezoelectric nanogenerator using a thin film of room temperature deposited nanocrystalline aluminium nitride (AlN). On a thin layer of aluminium (Al), the AlN thin film was grown using pulsed laser deposition (PLD). The room temperature grown AlN film was composed of crystalline columnar grains oriented in the (100)-direction, as revealed in images from transmission electron microscopy (TEM) and X-ray diffraction (XRD). Fundamental characterization of the AlN thin film by piezoresponse force microscopy (PFM) indicated that its electro-mechanical energy conversion metrics were comparable to those of c-axis oriented AlN and zinc oxide (ZnO) thin films. Additionally, the AlN-based flexible piezoelectric NG was encapsulated in polyimide to further strengthen its mechanical robustness and protect it from some corrosive chemicals.
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Registered trials
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