ReviewMicromachines2022
Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review.
Review in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 21 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
21 citing papers in PubMed.
- Investigation of area-dependent high-power failure of film bulk acoustic resonators.Microsystems & nanoengineering · 2026Article
- New Advances in Wide-Bandgap RF and Power Electronic Devices: From Material Innovation to System Integration.Micromachines · 2026Article
- Acoustic Bioprinting: A Glimpse Into an Emerging Field.Small methods · 2026Review
- Magnetically programmable surface acoustic wave filters: device concept and predictive modeling.Npj spintronics · 2026Article
- Innovations in Biosensing Technologies for Cancer Diagnosis and Theranostics.Mini reviews in medicinal chemistry · 2026Review
- Demonstration of Advanced Timing Schemes in Time-Resolved X‑ray Diffraction Measurements.ACS omega · 2025Article
- High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure.Sensors (Basel, Switzerland) · 2025Article
- Miniaturized BAW Filter for Wide Band Application Based on High-Q Factor Active Inductor.Micromachines · 2025Article
- Recent Advances in SAW Sensors for Detection of Cancer Biomarkers.Biosensors · 2025Review
- Magnetoelectric BAW and SAW Devices: A Review.Micromachines · 2024Review
- A traveling surface acoustic wave-based micropiezoactuator: A tool for additive- and label-free cell lysis.Biomicrofluidics · 2024Article
- Improvement of SAW Resonator Performance by Petal-like Topological Insulator.Sensors (Basel, Switzerland) · 2024Article
- Characterizing Acoustic Behavior of Silicon Microchannels Separated by a Porous Wall.Micromachines · 2024Article
- Evaluation of Acoustophoretic and Dielectrophoretic Forces for Droplet Injection in Droplet-Based Microfluidic Devices.ACS omega · 2024Article
- Surface Acoustic Wave Resonator Chip Setup for the Elimination of Interfering Conductivity Responses.Micromachines · 2024Article
- Acoustic Actuators for the Manipulation of Micro/Nanorobots: State-of-the-Art and Future Outlooks.Micromachines · 2024Review
- Modeling for High-Frequency Spurious Responses in Incredible High-Performance Surface Acoustic Wave Devices.Micromachines · 2024Article
- Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators.Micromachines · 2023Article
- Designed Structures of Interdigital Electrodes for Thin Film SAW Devices.Micromachines · 2023Article
- Super-High-Frequency Bulk Acoustic Resonators Based on Aluminum Scandium Nitride for Wideband Applications.Nanomaterials (Basel, Switzerland) · 2023Article
Corrections and comments
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Authors and funding
3 authors.
Funding
Abstract
The past few decades have witnessed the ultra-fast development of wireless telecommunication systems, such as mobile communication, global positioning, and data transmission systems. In these applications, radio frequency (RF) acoustic devices, such as bulk acoustic waves (BAW) and surface acoustic waves (SAW) devices, play an important role. As the integration technology of BAW and SAW devices is becoming more mature day by day, their application in the physical and biochemical sensing and actuating fields has also gradually expanded. This has led to a profusion of associated literature, and this article particularly aims to help young professionals and students obtain a comprehensive overview of such acoustic technologies. In this perspective, we report and discuss the key basic principles of SAW and BAW devices and their typical geometries and electrical characterization methodology. Regarding BAW devices, we give particular attention to film bulk acoustic resonators (FBARs), due to their advantages in terms of high frequency operation and integrability. Examples illustrating their application as RF filters, physical sensors and actuators, and biochemical sensors are presented. We then discuss recent promising studies that pave the way for the exploitation of these elastic wave devices for new applications that fit into current challenges, especially in quantum acoustics (single-electron probe/control and coherent coupling between magnons and phonons) or in other fields.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.