Evidence map›Paper›PMID 36676218›Full record

ArticleMaterials (Basel, Switzerland)2023

Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas.

Andrei V Turutin, Elena A Skryleva, Ilya V Kubasov, Filipp O Milovich, Alexander A Temirov, Kirill V Raketov, Aleksandr M Kislyuk, Roman N Zhukov, Boris R Senatulin, Victor V Kuts and 3 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Materials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

13 authors.

Andrei V TurutinLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.ORCID 0000-0003-1090-3441
Elena A SkrylevaLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.
Ilya V KubasovLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.ORCID 0000-0002-6569-466X
Filipp O MilovichLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.
Alexander A TemirovLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.
Kirill V RaketovLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.ORCID 0000-0003-1108-2235
Aleksandr M KislyukLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.
Roman N ZhukovLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.
Boris R SenatulinLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.
Victor V KutsLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.ORCID 0000-0002-9780-5686
Mikhail D MalinkovichLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.
Yuriy N ParkhomenkoLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.ORCID 0000-0002-1970-9867
Nikolai A SobolevLaboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.ORCID 0000-0002-9420-8130

Funding

Russian Science Foundation 22-19-00808The Ministry of Education and Science of the Russian Federation 0718-2020-0031The Ministry of Education and Science of the Russian Federation 075-15-2021-696
6 · The paper itself

Abstract

Non-contact mapping of magnetic fields produced by the human heart muscle requires the application of arrays of miniature and highly sensitive magnetic field sensors. In this article, we describe a MEMS technology of laminated magnetoelectric heterostructures comprising a thin piezoelectric lithium niobate single crystal and a film of magnetostrictive metglas. In the former, a ferroelectric bidomain structure is created using a technique developed by the authors. A cantilever is formed by microblasting inside the lithium niobate crystal. Metglas layers are deposited by magnetron sputtering. The quality of the metglas layers was assessed by XPS depth profiling and TEM. Detailed measurements of the magnetoelectric effect in the quasistatic and dynamic modes were performed. The magnetoelectric coefficient |α

Indexed as

bidomain lithium niobatemagnetic sensorsmagnetoelectric effectMEMSmetglasmicroblastingthin films

Identifiers

PMID36676218
PMCPMC9861317

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.