Evidence map›Paper›PMID 36671890›Full record

ReviewBiosensors2022

Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications.

Yashuo He, Haotian Wan, Xiaoning Jiang, Chang Peng

Abstract readReview
In one paragraph

Review in Biosensors, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 21 papers.

0numbers the graph read from it
0cells of the map it votes in
21citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

21 citing papers in PubMed.

  1. Article
  2. Article
  3. Review
  4. Recent advances in transducers for through-tissue ultrasonic power transfer.Progress in biomedical engineering (Bristol, England) · 2026
    Review
  5. Review
  6. Article
  7. Review
  8. Article
  9. Review
  10. Article
  11. Review
  12. Review
  13. Article
  14. Article
  15. Ultrasound sensing with optical microcavities.Light, science & applications · 2024
    Review
  16. Review
  17. Review
  18. Article
  19. Article
  20. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

4 authors.

Yashuo HeSchool of Biomedical Engineering, ShanghaiTech University, Shanghai 201210, China.
Haotian WanDepartment of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC 27695, USA.ORCID 0000-0002-4781-9270
Xiaoning JiangDepartment of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC 27695, USA.
Chang PengSchool of Biomedical Engineering, ShanghaiTech University, Shanghai 201210, China.ORCID 0000-0002-9495-1573

Funding

Shanghai Sailing Program 22YF1428900
6 · The paper itself

Abstract

The objective of this article is to review the recent advancement in piezoelectric micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric materials, device fabrication and characterization, as well as applications. PMUT has been an active research topic since the late 1990s because of the ultrasound application needs of low cost large 2D arrays, and the promising progresses on piezoelectric thin films, semiconductors, and micro/nano-electromechanical system technology. However, the industrial and medical applications of PMUTs have not been very significant until the recent success of PMUT based fingerprint sensing, which inspired growing interests in PMUT research and development. In this paper, recent advances of piezoelectric materials for PMUTs are reviewed first by analyzing the material properties and their suitability for PMUTs. PMUT structures and the associated micromachining processes are next reviewed with a focus on the complementary metal oxide semiconductor compatibility. PMUT prototypes and their applications over the last decade are then summarized to show the development trend of PMUTs. Finally, the prospective future of PMUTs is discussed as well as the challenges on piezoelectric materials, micro/nanofabrication and device integration.

Indexed as

Micro-Electrical-Mechanical SystemsTransducersEquipment DesignTechnologyUltrasonographyairborne applicationsfingerprint sensingmedical imagingmicromachined ultrasound transducerphotoacoustic imagingpiezoelectric materialsPMUTtherapy

Identifiers

PMID36671890
PMCPMC9856188

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.