ArticleMicrosystems & nanoengineering2023
Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams.
Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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2 citing papers in PubMed.
- A novel high-sensitivity triaxial accelerometer based on 3-D phononic crystals.Microsystems & nanoengineering · 2026Article
- Monolithically integrated triaxial high-performance high-g accelerometer for high shock vibration signal measurements.Microsystems & nanoengineering · 2025Article
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Authors and funding
11 authors.
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Abstract
With the increasing demand for multidirectional vibration measurements, traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity, high natural frequency, and low cross-sensitivity simultaneously. Moreover, for piezoresistive accelerometers, achieving pure axial deformation of the piezoresistive beam can greatly improve performance, but it requires the piezoresistive beam to be located in a specific position, which inevitably makes the design more complex and limits the performance improvement. Here, a monolithically integrated triaxial high-performance accelerometer with pure axial stress piezoresistive beams was designed, fabricated, and tested. By controlling synchronous displacements at both piezoresistive beam ends, the pure axial stress states of the piezoresistive beams could be easily achieved with position independence without tedious calculations. The measurement unit for the
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