ReviewFrontiers of optoelectronics2021
Nanoimprint lithography for high-throughput fabrication of metasurfaces.
Review in Frontiers of optoelectronics, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 35 papers.
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Who cites it
35 citing papers in PubMed.
- Field-Programmable Mobile Magneto-Photonic Metaparticles for Active Light Manipulation and Steering.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Radiative Cooling with Transparent Microstructured Hybrid Organic-Inorganic Polymer Film Fabricated by Nanoimprint Lithography.ACS applied materials & interfaces · 2026Article
- Wafer-Scale All-Dielectric Quasi-BIC Metasurfaces: Bridging High-Throughput Deep-UV Lithography with Nanophotonic Applications.Nano letters · 2026Article
- Demolding Simulation of Propagation Phase Metasurfaces via Roll-to-Plate Nanoimprint.Micromachines · 2025Article
- Tunable holographic metasurfaces for augmented and virtual reality.Nanophotonics (Berlin, Germany) · 2025Article
- Application of metasurface in future displays.Nanophotonics (Berlin, Germany) · 2025Review
- Nanophotonic Materials and Devices: Recent Advances and Emerging Applications.Micromachines · 2025Review
- Metasurface-based large field-of-view light receiver for enhanced LiDAR systems.Nanophotonics (Berlin, Germany) · 2025Article
- Nanophotonic sensing and label-free imaging of extracellular vesicles.Light, science & applications · 2025Review
- 3D Femtosecond Laser Beam Deflection for High-Precision Fabrication and Modulation of Individual Voxelated PCM Meta-Atoms.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Tape-Assisted Residual Layer-Free One-Step Nanoimprinting of High-Index Hybrid Polymer for Optical Loss-Suppressed Metasurfaces.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Enabling Fast AI-Driven Inverse Design of a Multifunctional Nanosurface by Parallel Evolution Strategies.Nanomaterials (Basel, Switzerland) · 2024Article
- Artificial Intelligence-Enhanced Metasurfaces for Instantaneous Measurements of Dispersive Refractive Index.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Article
- Recent Trends of Bioanalytical Sensors with Smart Health Monitoring Systems: From Materials to Applications.Advanced healthcare materials · 2024Review
- Plasmonic silver and gold nanoparticles: shape- and structure-modulated plasmonic functionality for point-of-caring sensing, bio-imaging and medical therapy.Chemical Society reviews · 2024Review
- Radiative Cooling for Energy Sustainability: From Fundamentals to Fabrication Methods Toward Commercialization.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Review
- Hydrogels for active photonics.Microsystems & nanoengineering · 2024Review
- Tailoring high-refractive-index nanocomposites for manufacturing of ultraviolet metasurfaces.Microsystems & nanoengineering · 2024Article
- Azimuthal rotation-controlled nanoinscribing for continuous patterning of period- and shape-tunable asymmetric nanogratings.Microsystems & nanoengineering · 2024Article
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6 authors.
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Abstract
Metasurfaces are composed of periodic sub-wavelength nanostructures and exhibit optical properties that are not found in nature. They have been widely investigated for optical applications such as holograms, wavefront shaping, and structural color printing, however, electron-beam lithography is not suitable to produce large-area metasurfaces because of the high fabrication cost and low productivity. Although alternative optical technologies, such as holographic lithography and plasmonic lithography, can overcome these drawbacks, such methods are still constrained by the optical diffraction limit. To break through this fundamental problem, mechanical nanopatterning processes have been actively studied in many fields, with nanoimprint lithography (NIL) coming to the forefront. Since NIL replicates the nanopattern of the mold regardless of the diffraction limit, NIL can achieve sufficiently high productivity and patterning resolution, giving rise to an explosive development in the fabrication of metasurfaces. In this review, we focus on various NIL technologies for the manufacturing of metasurfaces. First, we briefly describe conventional NIL and then present various NIL methods for the scalable fabrication of metasurfaces. We also discuss recent applications of NIL in the realization of metasurfaces. Finally, we conclude with an outlook on each method and suggest perspectives for future research on the high-throughput fabrication of active metasurfaces.
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