Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity.

Chia-Yu Cho, Jui-Chen Chang, Min-Xian Cai, Pei-Ting Lin, Yao-Joe Yang

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Article in Polymers, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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1citing papers in PubMed

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1 citing paper in PubMed.

Thickness Thresholds for Generating Plasmonic Surfaces via Solid-State Dewetting of Ultrathin Silver Films on Soft Polymeric Substrates.ACS omega · 2026
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5 · Who and what money

Authors and funding

5 authors.

Chia-Yu ChoDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.

Jui-Chen ChangDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.

Min-Xian CaiDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.

Pei-Ting LinDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.

Yao-Joe YangDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.

Funding

Ministry of Science and Technology (Republic of China) 109-2221-E-002-073-MY3

6 · The paper itself

Abstract

This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-deposited metal film into randomly distributed islands. The NPA properties, such as the mean particle size and the spacing between adjacent particles, can be easily tailored by controlling the dewetting temperature, as well as the as-deposited metal-film thickness. The fabricated NPAs were employed to develop gauge pressure sensors with high sensitivity. The proposed sensor consists of a sealed reference-pressure cavity, a polyimide (PI) membrane patterned with an interdigital electrode pair (IEP), and a silver NPA deposited on the IEP and the PI membrane. The operational principle of the device is based on the NPA percolation effect with deformation-dependence. The fabricated sensors exhibit rapid responses and excellent linearity at around 1 atm. The maximum sensitivity is about 0.1 kPa

Indexed as

dewetting processnanoparticle arrayspercolationpressure sensorsilver thin film

Identifiers

PMID36616531

DOI10.3390/polym15010180

PMCPMC9823326

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