Evidence map›Paper›PMID 36557559›Full record

ArticleMicromachines2022

Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections.

Meilin Ji, Haolin Yang, Yongxin Zhou, Xueying Xiu, Haochen Lv, Songsong Zhang

Abstract read
In one paragraph

Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Meilin JiSchool of Microelectronics, Shanghai University, Shanghai 200444, China.
Haolin YangSchool of Microelectronics, Shanghai University, Shanghai 200444, China.
Yongxin ZhouSchool of Microelectronics, Shanghai University, Shanghai 200444, China.ORCID 0000-0001-8548-1285
Xueying XiuSchool of Microelectronics, Shanghai University, Shanghai 200444, China.
Haochen LvShanghai Industrial µTechnology Research Institute, Shanghai 201800, China.
Songsong ZhangSchool of Microelectronics, Shanghai University, Shanghai 200444, China.

Funding

National Key Research and Development Program of China No.2021YFB3202500
6 · The paper itself

Abstract

This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc

Indexed as

bimorphdual-electrodePMUTscandium-doped aluminum nitride (Sc0.2Al0.8N)

Identifiers

PMID36557559
PMCPMC9785527

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.