ReviewMicromachines2022
MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics.
Review in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 10 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
10 citing papers in PubMed, 47 citations in OpenAlex.
- Robust structural superlubric interfaces under high current density, from understandings to applications.Microsystems & nanoengineering · 2026Article
- Multichannel soft microfluidic force sensors: design, characterization, and application in laparoscopy.Microsystems & nanoengineering · 2026Article
- Advances in Bio-Microelectromechanical System-Based Sensors for Next-Generation Healthcare Applications.ACS omega · 2025Review
- Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications.Micromachines · 2024Article
- Inductive Paper-Based Flexible Contact Force Sensor Utilizing Natural Micro-Nanostructures of Paper: Simplicity, Economy, and Eco-Friendliness.Micromachines · 2024Article
- Leveraging imitation learning in agricultural robotics: a comprehensive survey and comparative analysis.Frontiers in robotics and AI · 2024Review
- Haptic Sensing and Feedback Techniques toward Virtual Reality.Research (Washington, D.C.) · 2024Review
- A 3D Composited Flexible Sensor Based on Percolative Nanoparticle Arrays to Discriminate Coupled Pressure and Strain.Sensors (Basel, Switzerland) · 2023Article
- Measures of Maximal Tactile Pressures during a Sustained Grasp Task Using a TactArray Device Have Satisfactory Reliability and Concurrent Validity in People with Stroke.Sensors (Basel, Switzerland) · 2023Article
- A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach.Microsystems & nanoengineering · 2023Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
1 author at 1 institution in 1 country.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Commonly encountered problems in the manipulation of objects with robotic hands are the contact force control and the setting of approaching motion. Microelectromechanical systems (MEMS) sensors on robots offer several solutions to these problems along with new capabilities. In this review, we analyze tactile, force and/or pressure sensors produced by MEMS technologies including off-the-shelf products such as MEMS barometric sensors. Alone or in conjunction with other sensors, MEMS platforms are considered very promising for robots to detect the contact forces, slippage and the distance to the objects for effective dexterous manipulation. We briefly reviewed several sensing mechanisms and principles, such as capacitive, resistive, piezoresistive and triboelectric, combined with new flexible materials technologies including polymers processing and MEMS-embedded textiles for flexible and snake robots. We demonstrated that without taking up extra space and at the same time remaining lightweight, several MEMS sensors can be integrated into robotic hands to simulate human fingers, gripping, hardness and stiffness sensations. MEMS have high potential of enabling new generation microactuators, microsensors, micro miniature motion-systems (e.g., microrobots) that will be indispensable for health, security, safety and environmental protection.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.