ArticleMicromachines2022
Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Thermal conductivity and optical phonon scattering of CMOS compatible aluminum nitride based ferroelectric thin films.Nature communications · 2026Article
- 5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications.Microsystems & nanoengineering · 2024Article
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Authors and funding
11 authors.
Funding
Abstract
Film bulk acoustic resonators (FBARs) with a desired effective electromechanical coupling coefficient (Keff2) are essential for designing filter devices. Using AlN/AlScN composite film with the adjustable thickness ratio can be a feasible approach to obtain the required Keff2. In this work, we research the resonant characteristics of FBARs based on AlN/AlScN composite films with different thickness ratios by finite element method and fabricate FBAR devices in a micro-electromechanical systems process. Benefiting from the large piezoelectric constants, with a 1 μm-thick Al
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