ReviewRSC advances2022
Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring.
Review in RSC advances, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
2 citing papers in PubMed.
- Machine Learning-Assisted Burst Femtosecond Laser Polishing of Invar Alloy: Process Optimization and Performance Enhancement.Nanomaterials (Basel, Switzerland) · 2026Article
- Fabrication of functional micro-nano structures using phase holographically modulated femtosecond laser technology: a review.Nanophotonics (Berlin, Germany) · 2025Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
10 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Three-dimensional (3D) micro/nano structures are significant in many applications because of their novel multi-functions and potential in high integration. As is known, the traditional methods for the processing of 3D micro/nano structures exhibit disadvantages in mass production and machining precision. Alternatively, ultrafast laser machining, as a rapid and high-power-density processing method, exhibits advantages in 3D micro/nano structuring due to its characteristics of extremely high peak power and ultra-short pulse. With the development of ultrafast laser processing for fine and complex structures, it is attracting significant interest and showing great potential in the manufacture of 3D micro/nano structures. In this review, we introduce the optimization mechanism of ultrafast laser machining in detail, such as the optimization of the repetition rate and pulse energy of the laser. Furthermore, the specific applications of 3D micro/nano structures by laser processing in the optical, electrochemical and biomedical fields are elaborated, and a valuable summary and perspective of 3D micro/nano manufacturing in these fields are provided.
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Registered trials
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