Evidence map›Paper›PMID 36502058›Full record

ArticleSensors (Basel, Switzerland)2022

Optical Temperature Sensor Based on Polysilicon Waveguides.

Xinru Xu, Yuexin Yin, Chunlei Sun, Lan Li, Hongtao Lin, Bo Tang, Peng Zhang, Changming Chen, Daming Zhang

Open access · goldAbstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

0.4field-weighted citation impact, top 42% of its field

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed, 5 citations in OpenAlex.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

9 authors at 4 institutions in 1 country.

Xinru XuState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.ORCID 0000-0002-2820-4254

Yuexin YinState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.ORCID 0000-0003-0774-0362

Chunlei SunKey Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China.

Lan LiKey Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China.ORCID 0000-0002-9097-9157

Hongtao LinState Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China.

Bo TangInstitute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.

Peng ZhangInstitute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.

Changming ChenState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.ORCID 0000-0002-7400-6662

Daming ZhangState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.ORCID 0000-0002-5651-8699

Jilin University · CNChinese Academy of Sciences · CNWestlake University · CNState Key Laboratory of Modern Optical Instruments

Funding

the National Key Research and Development Program of China No. 2019YFB2203003

6 · The paper itself

Abstract

Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach-Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm/K and 85.7 pm/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications.

Indexed as

Optics and PhotonicsSemiconductorsElectronicsPhotonsTemperatureAMZIdual-microring resonatorpolysilicontemperature sensors

Identifiers

PMID36502058

DOI10.3390/s22239357

PMCPMC9736333

OpenAlexW4311050724

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.