Evidence map›Paper›PMID 36470963›Full record

ArticleScientific reports2022

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation.

Reina Miyagawa, Daisuke Kamibayashi, Hirotaka Nakamura, Masaki Hashida, Heishun Zen, Toshihiro Somekawa, Takeshi Matsuoka, Hiroyuki Ogura, Daisuke Sagae, Yusuke Seto and 4 more

Abstract read
In one paragraph

Article in Scientific reports, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

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Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

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4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

14 authors.

Reina MiyagawaDepartment of Physical Science and Engineering, Nagoya Institute of Technology, Gokiso, Showa, Nagoya, 466-8555, Japan. miyagawa.reina@nitech.ac.jp.
Daisuke KamibayashiGraduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871, Japan.
Hirotaka NakamuraGraduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871, Japan.
Masaki HashidaInstitute for Chemical Research, Kyoto University, Gokasho, Uji, Kyoto, 611-0011, Japan.
Heishun ZenInstitute of Advanced Energy, Kyoto University, Gokasho, Uji, Kyoto, 611-0011, Japan.
Toshihiro SomekawaInstitute for Laser Technology, Nishi-ku, Osaka, 550-0004, Japan.
Takeshi MatsuokaInstitute for Open and Transdisciplinary Research Initiatives, Osaka University, Suita, Osaka, 565-0871, Japan.
Hiroyuki OguraGraduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871, Japan.
Daisuke SagaeGraduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871, Japan.
Yusuke SetoGraduate School of Science, Kobe University, Kobe, Hyogo, 657-8501, Japan.
Takahisa ShobuMaterial Science Research Center, Japan Atomic Energy Agency, Sayo, Hyogo, 679-5148, Japan.
Aki TominagaMaterial Science Research Center, Japan Atomic Energy Agency, Sayo, Hyogo, 679-5148, Japan.
Osamu EryuDepartment of Physical Science and Engineering, Nagoya Institute of Technology, Gokiso, Showa, Nagoya, 466-8555, Japan.
Norimasa OzakiGraduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871, Japan.

Funding

Grant-in-Aid for Challenging Research Pioneering 18H05338Grant-in-Aid for Scientific Research on Innovative Areas JP16H06415Grant-in-Aid for Young Scientists (B) JP17K14111MEXT Quantum Leap Flagship Program JPMXS0118070187the Japan Synchrotron Radiation Research Institute 2018A3738the Japan Synchrotron Radiation Research Institute 2019A3741the Japan Synchrotron Radiation Research Institute 2020A3739ZE Research Program, IAE ZE2020B-51ZE Research Program, IAE ZE2021B-41
6 · The paper itself

Abstract

Laser-induced periodic surface structure (LIPSS), which has a period smaller than the laser wavelength, is expected to become a potential technique for fine surface processing. We report the microscopic and macroscopic observations of the crystallinity of LIPSSs, where the characteristics such as defects generation and residual strain were analyzed, respectively. The LIPSSs were formed on a Si substrate using two different femtosecond pulses from Ti:Sapphire laser with near-infrared wavelength (0.8 μm) and free-electron laser (FEL) with mid-infrared wavelength (11.4 μm). The photon energies of the former and latter lasers used here are higher and lower than the Si bandgap energies, respectively. These LIPSSs exhibit different crystalline states, where LIPSS induced by Ti:Sapphire laser show residual strain while having a stable crystallinity; in contrast, FEL-LIPSS generates defects without residual strain. This multiple analysis (microscopic and macroscopic observations) provides such previously-unknown structural characteristics with high spatial resolution. To obtain LIPSS with suitable properties and characteristics based on each application it is paramount to identify the laser sources that can achieve such properties. Therefore, identifying the structural information of the LIPSS generated by each specific laser is of great importance.

Identifiers

PMID36470963
PMCPMC9722692

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