Evidence map›Paper›PMID 36432377›Full record

ArticleNanomaterials (Basel, Switzerland)2022

Nanoscale Printing of Indium-Tin-Oxide by Femtosecond Laser Pulses.

Jingwen Hu, Zhen-Ze Li, Yang-Yang Zhao, Yi-Shi Xu, Lin Wang, Molong Han, Lachlan Hyde, Soon Hock Ng, Lei Wang, Saulius Juodkazis

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Nanomaterials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Jingwen HuOptical Sciences Centre and ARC Training Centre in Surface Engineering for Advanced Materials (SEAM), School of Science, Swinburne University of Technology, Hawthorn, VIC 3122, Australia.
Zhen-Ze LiState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Yang-Yang ZhaoState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Yi-Shi XuState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Lin WangState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Molong HanOptical Sciences Centre and ARC Training Centre in Surface Engineering for Advanced Materials (SEAM), School of Science, Swinburne University of Technology, Hawthorn, VIC 3122, Australia.
Lachlan HydeSpace Technology and Industry Institute, Graphene Certification Labs, Swinburne University of Technology, Hawthorn, VIC 3122, Australia.
Soon Hock NgOptical Sciences Centre and ARC Training Centre in Surface Engineering for Advanced Materials (SEAM), School of Science, Swinburne University of Technology, Hawthorn, VIC 3122, Australia.ORCID 0000-0002-9164-3399
Lei WangState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.ORCID 0000-0001-7977-5543
Saulius JuodkazisOptical Sciences Centre and ARC Training Centre in Surface Engineering for Advanced Materials (SEAM), School of Science, Swinburne University of Technology, Hawthorn, VIC 3122, Australia.ORCID 0000-0003-3542-3874

Funding

Australian Research Council DP190103284Australian Research Council LP190100505Interdisciplinary Integration and Innovation Project of JLU JLUXKJC2021ZZ15National Natural Science Foundation of China 61805100National Natural Science Foundation of China 61827826National Natural Science Foundation of China 62131018National Natural Science Foundation of China 62175086Natural Science Foundation of Jilin Province 20220101107JC
6 · The paper itself

Abstract

For constructing optical and electrical micro-devices, the deposition/printing of materials with sub-1 μm precision and size (cross-section) is required. Crystalline c-ITO (indium tin oxide) nanostructures were patterned on glass with sufficient precision to form 20-50 nm gaps between individual disks or lines of ∼250 nm diameter or width. The absorbed energy density [J/cm3] followed a second-order dependence on pulse energy. This facilitated high-resolution and precise nanoscale laser-writing at a laser wavelength of 515 nm. Patterns for optical elements such as circular gratings and micro-disks were laser-printed using ITO as a resist. Unexposed amorphous a-ITO was chemically removed in aqueous 1% vol. HF solution. This use of a-ITO as a solid resist holds promise for metamaterial and micro-optical applications.

Indexed as

IRITOlaser printingsolid resist

Identifiers

PMID36432377
PMCPMC9694177

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.