ArticleMicrosystems & nanoengineering2022
Thin ceramic PZT dual- and multi-frequency pMUT arrays for photoacoustic imaging.
Article in Microsystems & nanoengineering, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 17 papers.
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Who cites it
17 citing papers in PubMed.
- From lab design to clinical translation: photoacoustic endoscopy.Photoacoustics · 2026Review
- Dual-frequency fiber-array photoacoustic computed tomography for high-resolution deep brain imaging.Light, science & applications · 2026Article
- Theoretical modelling and optimization design of PMUT arrays for enhanced acoustic performance.Microsystems & nanoengineering · 2026Article
- Design, Fabrication and Characterization of Multi-Frequency MEMS Transducer for Photoacoustic Imaging.Micromachines · 2026Article
- Structural Optimization and Simulation of Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers.Micromachines · 2025Article
- SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators.Microsystems & nanoengineering · 2025Article
- Review of Linear-Array-Transducer-Based Volumetric Ultrasound Imaging Techniques and Their Biomedical Applications.Bioengineering (Basel, Switzerland) · 2025Review
- Localized ultrasonic stimulation using a piezoelectric micromachined ultrasound transducer array for selective neural differentiation of magnetic cell-based robots.Microsystems & nanoengineering · 2025Article
- Emerging Wearable Acoustic Sensing Technologies.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Review
- Stress-eliminated liquid-phase fabrication of colloidal films above the critical crack thickness.Nature communications · 2024Article
- A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging.Microsystems & nanoengineering · 2024Article
- Perspectives on endoscopic functional photoacoustic microscopy.Applied physics letters · 2024Article
- A head-mounted photoacoustic fiberscope for hemodynamic imaging in mobile mice.Light, science & applications · 2024Article
- Photoacoustic imaging plus X: a review.Journal of biomedical optics · 2024Review
- A Review of Fingerprint Sensors: Mechanism, Characteristics, and Applications.Micromachines · 2023Review
- Dual-frequency piezoelectric micromachined ultrasound transducer based on polarization switching in ferroelectric thin films.Microsystems & nanoengineering · 2023Article
- Thin-film PMUTs: a review of over 40 years of research.Microsystems & nanoengineering · 2023Review
Corrections and comments
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Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Miniaturized ultrasonic transducer arrays with multiple frequencies are key components in endoscopic photoacoustic imaging (PAI) systems to achieve high spatial resolution and large imaging depth for biomedical applications. In this article, we report on the development of ceramic thin-film PZT-based dual- and multi-frequency piezoelectric micromachined ultrasonic transducer (pMUT) arrays and the demonstration of their PAI applications. With chips sized 3.5 mm in length or 10 mm in diameter, square and ring-shaped pMUT arrays incorporating as many as 2520 pMUT elements and multiple frequencies ranging from 1 MHz to 8 MHz were developed for endoscopic PAI applications. Thin ceramic PZT with a thickness of 9 μm was obtained by wafer bonding and chemical mechanical polishing (CMP) techniques and employed as the piezoelectric layer of the pMUT arrays, whose piezoelectric constant
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