ArticleMicrosystems & nanoengineering2022
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging.
Article in Microsystems & nanoengineering, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 17 papers.
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Who cites it
17 citing papers in PubMed.
- From lab design to clinical translation: photoacoustic endoscopy.Photoacoustics · 2026Review
- Dual-frequency fiber-array photoacoustic computed tomography for high-resolution deep brain imaging.Light, science & applications · 2026Article
- High frame rate ultrasonic flowmeter based on PMUT array with bidirectional acoustic beams.Microsystems & nanoengineering · 2025Article
- Topology in Biological Piezoelectric Materials.Advanced materials (Deerfield Beach, Fla.) · 2025Review
- A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration.Microsystems & nanoengineering · 2025Article
- Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding.Micromachines · 2025Article
- Ceramics for Microelectromechanical Systems Applications: A Review.Micromachines · 2024Review
- A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging.Microsystems & nanoengineering · 2024Article
- Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films.Micromachines · 2024Article
- Perspectives on endoscopic functional photoacoustic microscopy.Applied physics letters · 2024Article
- Design, Fabrication, Characterization, and Simulation of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer for Sonar Imaging Applications.Micromachines · 2024Article
- Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer.Micromachines · 2024Article
- Photoacoustic imaging plus X: a review.Journal of biomedical optics · 2024Review
- Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array.Sensors (Basel, Switzerland) · 2023Article
- Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders.Micromachines · 2023Review
- Dual-frequency piezoelectric micromachined ultrasound transducer based on polarization switching in ferroelectric thin films.Microsystems & nanoengineering · 2023Article
- Thin-film PMUTs: a review of over 40 years of research.Microsystems & nanoengineering · 2023Review
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Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This paper reports on an aluminum nitride (AlN) piezoelectric micromachined ultrasound transducer (PMUT) array for photoacoustic (PA) imaging, where the high-order resonance modes of the PMUT are utilized to improve imaging resolution. A flexural vibration mode (FVM) PMUT is fabricated and applied in a photoacoustic imaging (PAI) system. Specifically, the microelectromechanical system (MEMS)-based PMUT is suitable for PA endoscopic imaging of blood vessels and bronchi due to its miniature size and high sensitivity. More importantly, AlN is a nontoxic material, which makes it harmless for biomedical applications. In the PAI system, the AlN PMUT array is used to detect PA signals, and the acousto-mechanical response is designed and optimized at the PMUT's fundamental resonance. In this work, we focus on the high-order resonance performance of the PMUT PAI beyond the fundamental resonance. The acoustic and electrical responses of the PMUT's high-order resonance modes are characterized and analyzed. The fundamental and three high-order resonance bandwidths are 2.2, 8.8, 18.5, and 48.2 kHz. Compared with the resolution at the fundamental resonance mode, the resolutions at third- and fourth-order resonance modes increase by 38.7% and 76.9% in a phantom experiment. The high-order resonance modes of the AlN PMUT sensor array provide higher central frequency and wider bandwidth for PA signal detection, which increase the resolution of PAI compared to the PMUT working at the fundamental resonance mode.
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