Design and 3D FEM Analysis of a Flexible Piezoelectric Micromechanical Ultrasonic Transducer Based on Sc-Doped AlN Film.

Qinghua Ren, Junhong Chen, Xin Liu, Songsong Zhang, Yuandong Gu

Open access · goldAbstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it

0cells of the map it votes in

1citing papers in PubMed

0.7field-weighted citation impact, top 34% of its field

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed, 10 citations in OpenAlex.

Design, Fabrication, and Characterization of a Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Cantilever Beam-like Structure with Enhanced SPL for Air Detection Applications.Micromachines · 2025
Article

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors at 1 institution in 1 country.

Qinghua RenSchool of Microelectronics, Shanghai University, Shanghai 200444, China.ORCID 0000-0003-0372-7275

Junhong ChenSchool of Microelectronics, Shanghai University, Shanghai 200444, China.

Xin LiuSchool of Microelectronics, Shanghai University, Shanghai 200444, China.

Songsong ZhangSchool of Microelectronics, Shanghai University, Shanghai 200444, China.

Yuandong GuSchool of Microelectronics, Shanghai University, Shanghai 200444, China.ORCID 0000-0001-6131-3949

Shanghai University · CN

Funding

The National Natural Science Foundation of China 61851406The National Natural Science Foundation of China 62175143The Shanghai 2021 "Science and Technology Innovation Action Plan" star project 21QA1402900The Young Talent Launch Project N.13-G210-22-382

6 · The paper itself

Abstract

In this paper, a flexible piezoelectric micromachined ultrasonic transducer (PMUT) based on Scandium (Sc)-doped Aluminum Nitride (AlN) film was designed and modeled by the three-dimensional finite element method (3D-FEM). The resonant frequency of 218.1 kHz was reported. It was noticeable that a high effective electromechanical coupling coefficient (k

Indexed as

ScandiumUltrasonicsAluminum CompoundsEquipment DesignTransducersAluminum Compoundsaluminum nitrideScandium3D-FEMflexiblePMUTSc-doped AlNsimulation

Identifiers

PMID36365796

DOI10.3390/s22218100

PMCPMC9656918

OpenAlexW4307266189

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.