ArticleMicromachines2022
Design of GHz Mechanical Nanoresonator with High
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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6 authors.
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Abstract
Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades. With the rapid development of various radio frequency (RF) systems, such as 5G mobile telecommunications, satellite, and other wireless communication, this research has focused on a high frequency resonator with high quality. However, the resonator based on an inverse piezoelectric effect has met with a bottleneck in high frequency because of the low quality factor. Here, we propose a resonator based on optomechanical interaction (i.e., acoustic-optic coupling). A picosecond laser can excite resonance by radiation pressure. The design idea and the optimization of the resonator are given. Finally, with comprehensive consideration of mechanical losses at room temperature, the resonator can reach a high
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