ArticleMicromachines2022
Comparative Study of Gravimetric Humidity Sensor Platforms Based on CMUT and QCM.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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Who cites it
1 citing paper in PubMed.
- Xenes-based QCM sensors: exploring borophene and silicene for humidity sensing.Discover nano · 2025Article
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4 authors.
Funding
Abstract
Humidity sensors with comprehensive performance are of great interest for industrial and environmental applications. Most sensors, however, have to compromise on at least one characteristic such as sensitivity, response speed, and linearity. This paper reports a gravimetric humidity sensor based on a capacitive micromachined ultrasonic transducer (CMUT) with exceptional all-around performance, and presents a side-by-side comparative investigation of two types of gravimetric humidity sensors for a better understanding of their characteristics and sensing mechanisms. For these purposes, a circular CMUT and a quartz crystal microbalance (QCM) with a resonance frequency of 10 MHz were designed and fabricated. Poly(vinyl alcohol) (PVA) was employed as the humidity sensing layer for its hydrophilicity and ease of film formation. The electrical properties of the sensors, including the electrical input impedances and quality factors, were characterized by a vector network analyzer. The relative humidity (RH) sensing performance of the sensors was evaluated and compared from RH levels of 11% to 97%. Both sensors exhibited good repeatability and low hysteresis. The unique microscale resonant structure of the CMUT humidity sensor contributed to a high sensitivity of 2.01 kHz/%RH, short response and recovery times of 8 s and 3 s, respectively, and excellent linearity (
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