ArticleMicromachines2022
Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer.
Heng Liu et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
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ArticleMicromachines2022
Heng Liu et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.