ArticleMicromachines2022
PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
5 citing papers in PubMed.
- First-Principles Calculations and PMUT Applications of Piezoelectric Thin-Film Materials.Micromachines · 2026Article
- Recent Advances in MEMS Actuators for Microfluidic Applications: Emerging Designs, Multiphysics Modeling, and Performance Optimization.Micromachines · 2026Review
- Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders.Micromachines · 2023Review
- Recent Advances in Flexible Ultrasonic Transducers: From Materials Optimization to Imaging Applications.Micromachines · 2023Review
- Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications.Biosensors · 2022Review
Corrections and comments
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Authors and funding
7 authors.
Funding
Abstract
We proposed a PZT-film-based piezoelectric micromachined ultrasonic transducer (pMUT) with an I-shaped composite diaphragm to improve the sensitivity and resonant frequency of pMUTs with the same diaphragm area. The finite element method (FEM) simulation results indicated that the pMUT with an I-shaped composite diaphragm had relatively high sensitivity and resonant frequency. The pMUT with an I-shaped diaphragm had a 36.07% higher resonant frequency than a pMUT with a circular diaphragm. The pMUT with an I-shaped diaphragm had a 3.65 dB higher loop gain (loss) than a pMUT with a rectangular diaphragm. The piezoelectric layer thickness of the pMUT with an I-shaped composite diaphragm was then optimized. Maximum loop gain (loss) was reached when the piezoelectric layer thickness was 8 μm. The pMUT with an I-shaped composite diaphragm was fabricated using the MEMS method, and its performance was evaluated.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.