ArticleNature communications2022
Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform.
Article in Nature communications, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 12 papers.
What it found
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The trial behind it
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Who cites it
12 citing papers in PubMed.
- Interface-controlled broadband photodetection in SiScientific reports · 2026Article
- Engineering Properties of GeSi Alloy Quantum Dots by High-Temperature Annealing.Nanomaterials (Basel, Switzerland) · 2026Article
- All-optical modulation with single photons using an electron avalanche.Nature nanotechnology · 2026Article
- A CMOS-Compatible Silicon Nanowire Array Natural Light Photodetector with On-Chip Temperature Compensation Using a PSO-BP Neural Network.Micromachines · 2025Article
- Tapered Cladding Design for Monolithic Waveguide-Photodetector Coupling in Si-Based Integrated Photonics.Nanomaterials (Basel, Switzerland) · 2025Article
- Integrated Photonic Biosensors: Enabling Next-Generation Lab-on-a-Chip Platforms.Nanomaterials (Basel, Switzerland) · 2025Review
- Investigation of Modal Characteristics of Silicon Nitride Ridge Waveguides for Enhanced Refractive Index Sensing.Micromachines · 2025Article
- Ultra-large nonlinear parameters and all-optical modulation of a transition metal dichalcogenides on silicon waveguide.Scientific reports · 2025Article
- Photonic neural probe enabled microendoscopes for light-sheet light-field computational fluorescence brain imaging.Neurophotonics · 2024Article
- Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics.Light, science & applications · 2024Article
- Microcantilever-integrated photonic circuits for broadband laser beam scanning.Nature communications · 2023Article
- Functionalization of a Fully Integrated Electrophotonic Silicon Circuit for Biotin Sensing.Biosensors · 2023Article
Corrections and comments
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Authors and funding
11 authors.
Funding
Abstract
Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of >60% across a record wavelength span from λ ~ 400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 ± 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.
Identifiers
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.