ArticleJournal of imaging2022
A Novel Defect Inspection System Using Convolutional Neural Network for MEMS Pressure Sensors.
Article in Journal of imaging, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
3 citing papers in PubMed.
- YOLO-DST: MEMS Small-Object Defect Detection Method Based on Dynamic Channel-Spatial Modeling and Multi-Attention Fusion.Sensors (Basel, Switzerland) · 2026Article
- Current State of the Art and Potential for Construction and Demolition Waste Processing: A Scoping Review of Sensor-Based Quality Monitoring and Control for In- and Online Implementation in Production Processes.Sensors (Basel, Switzerland) · 2025Review
- Neural Network Methods in the Development of MEMS Sensors.Micromachines · 2024Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
6 authors.
Funding
Abstract
Defect inspection using imaging-processing techniques, which detects and classifies manufacturing defects, plays a significant role in the quality control of microelectromechanical systems (MEMS) sensors in the semiconductor industry. However, high-precision classification and location are still challenging because the defect images that can be obtained are small and the scale of the different defects on the picture of the defect is different. Therefore, a simple, flexible, and efficient convolutional neural network (CNN) called accurate-detection CNN (ADCNN) to inspect MEMS pressure-sensor-chip packaging is proposed in this paper. The ADCNN is based on the faster region-based CNN, which improved the performance of the network by adding random-data augmentation and defect classifiers. Specifically, the ADCNN achieved a mean average precision of 92.39% and the defect classifier achieved a mean accuracy of 97.2%.
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.