ArticleSensors (Basel, Switzerland)2022
A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing.
Article in Sensors (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
5 citing papers in PubMed.
- SOI-Structured Piezoresistive Pressure Sensor with Integration of Temperature Sensor for Downhole Applications.Sensors (Basel, Switzerland) · 2026Article
- A 70 MPa silicon resonant pressure microsensor with resonators supported by micro beams based on volume compressed sensing.Microsystems & nanoengineering · 2025Article
- Pressure Sensors: Working Principles of Static and Dynamic Calibration.Sensors (Basel, Switzerland) · 2024Article
- Dynamic Focusing (DF) Cone-Based Omnidirectional Fingertip Pressure Sensor with High Sensitivity in a Wide Pressure Range.Sensors (Basel, Switzerland) · 2023Article
- Reciprocating Arc Silicon Strain Gauges.Sensors (Basel, Switzerland) · 2023Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
5 authors.
Funding
Abstract
This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is carried out, and the relationship between the structural parameters of the sensor and the stress is analyzed by finite element simulation and curve-fitting prediction, and then the optimal structural parameters are also analyzed. The simulation results indicate that the sensor with the CCSB structure proposed in this article obtained a high sensitivity of 87.74 μV/V/MPA and a low nonlinearity error of 0.28% full-scale span (FSS) within the pressure range of 0-200 MPa. Compared with All-Si Bulk, grooved All-Si Bulk, Si-Glass Bulk, silicon diaphragm, resistance strain gauge, and Fiber Bragg grating structure pressure sensors, the designed sensor has a significant improvement in sensitivity and nonlinearity error. It can be used as a new sensor for rock disaster (such as collapse) monitoring and forecasting.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.