Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling.

Wenxuan Yang, Wenchang Li, Huaxiang Lu, Jian Liu, Tianyi Zhang

Abstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

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2 · The registry

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3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

Paper-Based Humidity Sensors as Promising Flexible Devices, State of the Art, Part 2: Humidity-Sensor Performances.Nanomaterials (Basel, Switzerland) · 2023
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5 · Who and what money

Authors and funding

5 authors.

Wenxuan YangKey Laboratory of Solid-State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.

Wenchang LiKey Laboratory of Solid-State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.

Huaxiang LuUniversity of Chinese Academy of Sciences, Beijing 100049, China.

Jian LiuUniversity of Chinese Academy of Sciences, Beijing 100049, China.

Tianyi ZhangKey Laboratory of Solid-State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are difficult to ensure compatability with the CMOS process. The dynamic compensation method can shorten the response time by only adding digital circuits or software processing. However, conventional compensation technology is not suitable for humidity sensors due to temperature coupling. This paper proposes a new dynamic compensation method for humidity sensors based on the decoupling of temperature factors by analyzing the coupling relationship between sensor dynamic characteristics and temperature. Simulations and experiments were used to verify the proposed method. The experimental results show that the proposed method reduces the humidity response time of the sensor by 85.6%. The proposed method can effectively shorten the response time of humidity sensors.

Indexed as

dynamic compensationfast responsehumidity sensortemperature and humidity decoupling

Identifiers

PMID36236326

DOI10.3390/s22197229

PMCPMC9570529

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