ArticleNature communications2022
Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces.
Article in Nature communications, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 23 papers.
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Who cites it
23 citing papers in PubMed.
- Single-Pulse Femtosecond Laser 3D Multi-Foci Light-Field Engineering via Multi-Layer Noise Threshold Filtering.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Polarization-Controlled Wavelength-Tunable Pulsed Laser Based on Metafiber.Nanophotonics (Berlin, Germany) · 2026Article
- Editorial for the Special Issue on Recent Advances in Lithography.Micromachines · 2026Article
- Scanning-Based Dynamic Mask Projection for Ultrafast Laser Ablation of Thin Films.Nanomaterials (Basel, Switzerland) · 2026Article
- Polarization-independent surface nanostructuring by femtosecond laser irradiation via microsphere in far field and ambient air.Light, science & applications · 2026Article
- De-coherent parallel laser processing of ultradense nanopores for high-density, large-area 3D optical phase encoding.Nature communications · 2026Article
- Metaoptics merging computational optics and optical computing toward intelligent visual perception.Science advances · 2026Review
- Asymmetric Diffusion Metasurface-Based Lensless Monitoring and Uniform Illumination Systems for Optical Lithography.Research (Washington, D.C.) · 2026Article
- Phase-probability shaping for speckle-free holographic lithography.Nature communications · 2025Article
- Review for optical metalens based on metasurfaces: fabrication and applications.Microsystems & nanoengineering · 2025Review
- Direct Writing of Nanostructured Metasurfaces by Hot-Electron-Driven Laser Sintering.Nano letters · 2025Article
- Fabrication of functional micro-nano structures using phase holographically modulated femtosecond laser technology: a review.Nanophotonics (Berlin, Germany) · 2025Review
- 25 nm-Feature, 10Nature communications · 2025Article
- Patterning and Dynamics of Structured Surfaces in Metal/Covalent Organic Frameworks and Polymer Chemistry.Topics in current chemistry (Cham) · 2025Review
- Advancements and challenges in inverse lithography technology: a review of artificial intelligence-based approaches.Light, science & applications · 2025Review
- Nonlinearity symmetry breaking for generating tunable quantum entanglement in semiconductor metasurfaces.Science advances · 2025Article
- Femtosecond Laser-Induced Recrystallized Nanotexturing for Identity Document Security With Physical Unclonable Functions.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Enhancing metasurface fabricability through minimum feature size enforcement.Nanophotonics (Berlin, Germany) · 2024Article
- Objective-Free Ultrasensitive Biosensing on Large-Area Metamaterial Surfaces in the Near-IR.ACS applied materials & interfaces · 2024Article
- Recent Advances in Patterning Strategies for Full-Color Perovskite Light-Emitting Diodes.Nano-micro letters · 2023Review
Corrections and comments
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Authors and funding
6 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. We develop a patterned pulse laser lithography (PPLL) approach to create structure arrays with sub-wavelength feature resolution and periods from less than 1 μm to over 15 μm on large-area thin films with substrates under ambient conditions. Separated ultrafast laser pulses with patterned wavefront by quasi-binary phase masks rapidly create periodic ablated/modified structures by high-speed scanning. The gradient intensity boundary and circular polarization of the wavefront weaken diffraction and polarization-dependent asymmetricity effects during light propagation for high uniformity. Structural units of metasurfaces are obtained on metal and inorganic photoresist films, such as antennas, catenaries, and nanogratings. We demonstrate a large-area metasurface (10 × 10 mm
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.