ArticleScience advances2022
Self-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision.
Article in Science advances, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 13 papers.
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Who cites it
13 citing papers in PubMed, 42 citations in OpenAlex.
- Multimodal scanning-probe quantum sensing of quantum materials.Nature materials · 2026Review
- Diamond Sensor Technologies: From Multi Stimulus to Quantum.Micromachines · 2026Review
- Scalable nanoscale positioning of highly coherent color centers in prefabricated diamond nanostructures.Nature communications · 2025Article
- Entanglement-enhanced nanoscale single-spin sensing.Nature · 2025Article
- Programmable Nanostructure Assembly of a Paclitaxel Derivative Enables Tunable Anticancer Therapy via Hydrogen Bond Engineering.ACS nano · 2025Article
- Quantum relaxometry for detecting biomolecular interactions with single NV centers.Proceedings of the National Academy of Sciences of the United States of America · 2025Article
- Self-Aligned Multilayered Nitrogen Vacancy Diamond Nanoparticles for High Spatial Resolution Magnetometry of Microelectronic Currents.Nano letters · 2025Article
- Enhanced Quantum Magnetometry with a Femtosecond Laser-Written Integrated Photonic Diamond Chip.Nano letters · 2025Article
- Spatially Resolved Quantum Sensing with High-Density Bubble-Printed Nanodiamonds.Nano letters · 2024Article
- Silicon Vacancies Diamond/Silk/PVA Hierarchical Physical Unclonable Functions for Multi-Level Encryption.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Determining the Dependence of Single Nitrogen-Vacancy Center Light Extraction in Diamond Nanostructures on Emitter Positions with Finite-Difference Time-Domain Simulations.Nanomaterials (Basel, Switzerland) · 2023Article
- Complex Three-Dimensional Microscale Structures for Quantum Sensing Applications.Nano letters · 2023Article
- Self-aligned patterning of tantalum oxide on Cu/SiONature communications · 2023Article
Corrections and comments
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Authors and funding
10 authors at 1 institution in 1 country.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Efficient, nanoscale precision alignment of defect center creation in photonics structures in challenges the realization of high-performance photonic devices and quantum technology applications. Here, we propose a facile self-aligned patterning technique based on conventional engineering technology, with doping precision that can reach ~15 nm. We demonstrate this technique by fabricating diamond nanopillar sensor arrays with high consistency and near-optimal photon counts. The sensor array achieves high yield approaching the theoretical limit, and high efficiency for filtering sensors with different numbers of nitrogen vacancy centers. Combined with appropriate crystal orientation, the system achieves a saturated fluorescence rate of 4.34 Mcps and effective fluorescence-dependent detection sensitivity of 1800 cps
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.