ArticleMicrosystems & nanoengineering2022
Micro 3D printing of a functional MEMS accelerometer.
Article in Microsystems & nanoengineering, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 16 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
16 citing papers in PubMed.
- Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.Nature communications · 2026Article
- Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology.Microsystems & nanoengineering · 2026Article
- Three-Dimensionally Printed Sensors with Piezo-Actuators and Deep Learning for Biofuel Density and Viscosity Estimation.Sensors (Basel, Switzerland) · 2026Article
- Identification of Mechanical Parameters of the Silicon Structure of a Capacitive MEMS Accelerometer.Materials (Basel, Switzerland) · 2025Article
- Next-Gen Healthcare Devices: Evolution of MEMS and BioMEMS in the Era of the Internet of Bodies for Personalized Medicine.Micromachines · 2025Review
- 3D printing of micro-nano devices and their applications.Microsystems & nanoengineering · 2025Review
- Direct laser writing-enabled 3D printing strategies for microfluidic applications.Lab on a chip · 2024Review
- Article
- RETRACTED: Embedded Sensors with 3D Printing Technology: Review.Sensors (Basel, Switzerland) · 2024Review
- A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope.Microsystems & nanoengineering · 2024Article
- 3D Printed Integrated Sensors: From Fabrication to Applications-A Review.Nanomaterials (Basel, Switzerland) · 2023Review
- Femtosecond Laser Direct Writing of Gecko-Inspired Switchable Adhesion Interfaces on a Flexible Substrate.Micromachines · 2023Article
- Three-dimensional printing of silica glass with sub-micrometer resolution.Nature communications · 2023Article
- Additive Manufactured Strain Sensor Using Stereolithography Method with Photopolymer Material.Polymers · 2023Article
- A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach.Microsystems & nanoengineering · 2023Article
- MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics.Micromachines · 2022Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconductor manufacturing techniques. However, these techniques are not viable for the cost-efficient manufacturing of specialized MEMS devices at low- and medium-scale volumes. Thus, applications that require custom-designed MEMS devices for markets with low- and medium-scale volumes of below 5000-10,000 components per year are extremely difficult to address efficiently. The 3D printing of MEMS devices could enable the efficient realization and production of MEMS devices at these low- and medium-scale volumes. However, current micro-3D printing technologies have limited capabilities for printing functional MEMS. Herein, we demonstrate a functional 3D-printed MEMS accelerometer using 3D printing by two-photon polymerization in combination with the deposition of a strain gauge transducer by metal evaporation. We characterized the responsivity, resonance frequency, and stability over time of the MEMS accelerometer. Our results demonstrate that the 3D printing of functional MEMS is a viable approach that could enable the efficient realization of a variety of custom-designed MEMS devices, addressing new application areas that are difficult or impossible to address using conventional MEMS manufacturing.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.