ArticleNanoscale advances2019
Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films.
Article in Nanoscale advances, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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5 citing papers in PubMed.
- Dilute Regeneration-Driven Membrane Capacitive Deionization of Synthetic Seawater using Nanopatterned Membranes and Prussian Blue Analog Electrodes.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Thin films of the [Formula: see text]-quartz [Formula: see text] solid solution.Scientific reports · 2022Article
- Article
- Metal-Induced Crystallization in Metal Oxides.Accounts of chemical research · 2022Article
- Growth and Crystallization of SiONanomaterials (Basel, Switzerland) · 2021Article
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Authors and funding
8 authors.
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Abstract
Epitaxial films of piezoelectric α-quartz could enable the fabrication of sensors with unprecedented sensitivity for prospective applications in electronics, biology and medicine. However, the prerequisites are harnessing the crystallization of epitaxial α-quartz and tailoring suitable film microstructures for nanostructuration. Here, we bring new insights into the crystallization of epitaxial α-quartz films on silicon (100) from the devitrification of porous silica and the control of the film microstructures: we show that by increasing the quantity of devitrifying agent (Sr) it is possible to switch from an α-quartz microstructure consisting of a porous flat film to one dominated by larger, fully dense α-quartz crystals. We also found that the film thickness, relative humidity and the nature of the surfactant play an important role in the control of the microstructure and homogeneity of the films.
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