ArticlePolymers2022
Thermal Analysis of Parylene Thin Films for Barrier Layer Applications.
Article in Polymers, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.
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Who cites it
9 citing papers in PubMed.
- Parylenes in bioanalytical and cell culture applications.Analytical and bioanalytical chemistry · 2026Review
- Pyrolyzed Parylene Electrodes for Detection of Tryptophan, Tyrosine, and Gonadotropin-Releasing Hormone.ACS measurement science au · 2026Article
- Reducing Small Molecule Adsorption in a PDMS-Based Microphysiological System of the Female Reproductive Tract via Parylene-C Coating to Improve Mechanistic Studies.ACS applied materials & interfaces · 2026Article
- Recent applications of parylene and pyrolyzed parylene in sensors and devices: a review.Analytical and bioanalytical chemistry · 2026Review
- Designing parylene coating for implantable brain-machine interfaces.RSC advances · 2025Article
- Pyrolyzed Parylene-N forACS electrochemistry · 2025Article
- Evaluation of the Impact of Parylene C Deposition Method on the Functional Properties of Fabrics.Materials (Basel, Switzerland) · 2024Article
- An Evaluation of Parylene Thin Films to Prevent Encrustation for a Urinary Bladder Pressure MEMS Sensor System.Polymers · 2023Article
- Development of a Water Transmission Rate (WTR) Measurement System for Implantable Barrier Coatings.Polymers · 2023Article
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Authors and funding
10 authors.
Funding
Abstract
Biocompatible polymer films demonstrating excellent thermal stability are highly desirable for high-temperature (>250 °C) applications, especially in the bioelectronic encapsulation domain. Parylene, as an organic thin film, is a well-established polymer material exhibiting excellent barrier properties and is often the material of choice for biomedical applications. This work investigated the thermal impact on the bulk properties of four types of parylene films: parylene N, C, VT4, and AF4. The films, deposited using the standard Gorham process, were analyzed at varying annealing temperatures from room temperature up to 450 °C. Thermal properties were identified by differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA) methods, while X-ray diffraction (XRD) analysis showed the effect of high-temperature exposure on the structural properties. In addition to thermal and structural analysis, the barrier properties were measured through the helium transmission rate (HTR) and the water vapor transmission rate (WVTR). Fluorinated parylene films were confirmed to be exceptional materials for high-temperature applications. Parylene AF4 film, 25um thick, demonstrated excellent barrier performance after 300 °C exposure, with an HTR and a WVTR of 12.18 × 103 cm3 (STP) m−2 day−1 atm−1 and 6.6 g m−2 day−1, respectively.
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