ArticlePhotoacoustics2022
High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing.
Article in Photoacoustics, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.
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Who cites it
9 citing papers in PubMed.
- Rational Design and Fabrication of MEMS Gas Sensors With Long-Term Stability: A Comprehensive Review.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Review
- Three-dimensional optical path extended gourd-type photoacoustic cell for highly sensitive trace acetylene sensing.Photoacoustics · 2025Article
- ASensors (Basel, Switzerland) · 2025Article
- Multiple optical path length reflections enhancement based on balloon-type photoacoustic cell for trace gas sensing.Photoacoustics · 2025Article
- A mini-resonant photoacoustic sensor based on a sphere-cylinder coupled acoustic resonator for high-sensitivity trace gas sensing.Photoacoustics · 2024Article
- A 3D Composited Flexible Sensor Based on Percolative Nanoparticle Arrays to Discriminate Coupled Pressure and Strain.Sensors (Basel, Switzerland) · 2023Article
- A Miniaturized 3D-Printed Quartz-Enhanced Photoacoustic Spectroscopy Sensor for Methane Detection with a High-Power Diode Laser.Sensors (Basel, Switzerland) · 2023Article
- Multi-mechanism collaboration enhanced photoacoustic analyzer for trace HPhotoacoustics · 2023Article
- Ultra-High-Sensitivity, Miniaturized Fabry-Perot Interferometric Fiber-Optic Microphone for Weak Acoustic Signals Detection.Sensors (Basel, Switzerland) · 2022Article
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9 authors.
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Abstract
We report a miniature dual-resonance photoacoustic (PA) sensor, mainly consisting of a small resonant T-type PA cell and an integrated sensor probe based on a silicon cantilever beam. The resonance frequency of the miniature T-type PA cell is matched with the first-order natural frequency of the cantilever beam to achieve double resonance of the acoustic signal. The volume of the designed T-type PA cell is only about 2.26 cubic centimeters. A PA spectroscopy (PAS) system, employing the dual-resonance photoacoustic (PA) sensor as the prober and a high-speed spectrometer as the demodulator, has been implemented for high-sensitivity methane sensing. The sensitivity and the minimum detection limit can reach up to 2.0 pm/ppm and 35.6 parts-per-billion, respectively, with an averaging time of 100 s. The promising performance demonstrated a great potential of employing the reported sensor for high-sensitivity gas sensing in sub cubic centimeter-level spaces.
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