ArticlePhotoacoustics2022
Small-volume highly-sensitive all-optical gas sensor using non-resonant photoacoustic spectroscopy with dual silicon cantilever optical microphones.
Article in Photoacoustics, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 19 papers.
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19 citing papers in PubMed.
- A novel microscale multilayer PZT MEMS cantilever for resonant photoacoustic gas sensing.Photoacoustics · 2026Article
- Photoacoustic Gas Sensing Using a Novel Fluidic Microphone Based on Thermal MEMS.Sensors (Basel, Switzerland) · 2025Article
- Topological optimization method "MMA-BP" for photoacoustic resonator and implementations in ppt-level gas sensor using miniaturized vase-type photoacoustic cells.Photoacoustics · 2025Article
- Three-dimensional optical path extended gourd-type photoacoustic cell for highly sensitive trace acetylene sensing.Photoacoustics · 2025Article
- Multi-gas photoacoustic sensor using multi-mode demodulation.Photoacoustics · 2025Article
- Optomechanical energy enhanced BF-QEPAS for fast and sensitive gas sensing.Photoacoustics · 2025Article
- A Review on Photoacoustic Spectroscopy Techniques for Gas Sensing.Sensors (Basel, Switzerland) · 2024Review
- Cantilever-enhanced dual-comb photoacoustic spectroscopy.Photoacoustics · 2024Article
- Photoacoustic trace gas detection of OCS using a 2.45 mL Helmholtz resonator and a 4823.3 nm ICL light source.Photoacoustics · 2024Article
- Differential photoacoustic spectroscopy for flow gas detection based on single microphone.Photoacoustics · 2024Article
- New silicon-based micro-electro-mechanical systems for photo-acoustic trace-gas detection.Photoacoustics · 2024Article
- A mini-resonant photoacoustic sensor based on a sphere-cylinder coupled acoustic resonator for high-sensitivity trace gas sensing.Photoacoustics · 2024Article
- Miniaturized and highly-sensitive fiber-optic photoacoustic gas sensor based on an integrated tuning fork by mechanical processing with dual-prong differential measurement.Photoacoustics · 2023Article
- All-optical non-resonant photoacoustic spectroscopy for multicomponent gas detection based on aseismic photoacoustic cell.Photoacoustics · 2023Article
- Integrated near-infrared fiber-optic photoacoustic sensing demodulator for ultra-high sensitivity gas detection.Photoacoustics · 2023Article
- Photoacoustic spectroscopy-based ppb-level multi-gas sensor using symmetric multi-resonant cavity photoacoustic cell.Photoacoustics · 2023Article
- Cantilever-enhanced photoacoustic spectroscopy for gas sensing: A comparison of different displacement detection methods.Photoacoustics · 2022Review
- Optical Gas-Cell Dynamic Adsorption in a Photoacoustic Spectroscopy-Based SOFSensors (Basel, Switzerland) · 2022Article
- All-optical light-induced thermoacoustic spectroscopy for remote and non-contact gas sensing.Photoacoustics · 2022Article
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Authors and funding
8 authors.
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No grant is acknowledged in the PubMed record.
Abstract
A small-volume highly-sensitive photoacoustic spectroscopy (PAS) methane detection system based on differential silicon cantilever optical microphones (SCOMs) is proposed and experimentally demonstrated. The system contains a compact non-resonant photoacoustic cell with a small volume of 1.2 mL and symmetrically-located dual SCOMs, as well as a distributed feedback laser at 1650.96 nm. The two identical SCOMs utilize the Fabry-Perot interferometric fiber-optic structure, with the differential Q-point demodulation algorithm to suppress the external vibration noise. Experimental results show that the SCOM has a high displacement sensitivity about 7.1 µm/Pa at 150 Hz and within 2.5 dB fluctuation between 5 Hz and 250 Hz. In the PAS gas sensing experiment, the normalized noise equivalent absorption coefficient of the PAS system is estimated to be 1.2 × 10
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