ReviewNanomaterials (Basel, Switzerland)2022
Evolution in Lithography Techniques: Microlithography to Nanolithography.
Review in Nanomaterials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 45 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
45 citing papers in PubMed.
- Programmed synthesis of mesoporous protein crystals in cellular reactors.Nature nanotechnology · 2026Article
- Plasmonic and surface-enhanced Raman nanobiosensors for quantitative molecular detection.Discover nano · 2026Review
- Stitch-Less Lithography Empowered by Multi-Dimensional Holography.Nanomaterials (Basel, Switzerland) · 2026Article
- Modelling Key Performance Indicators (KPIs) in the Optimisation of Nanoimprint Lithography (NIL) Processes.Micromachines · 2026Article
- Navigating the Ethereal Tightrope: The Nanogenerator Manipulates Neurons for Immune Equilibrium.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Review
- The Evolution of Lithography: From Resolution Scaling to Manufacturing Constraints.Micromachines · 2026Review
- Integrated Strategies for Overcoming Resolution Limits in Electron Beam Lithography of Chemically Amplified Resists.ACS applied materials & interfaces · 2026Article
- Biodetection of Mycobacterium tuberculosis: nano-biosensors in detection; from principles to recent progresses.Journal of biological engineering · 2026Review
- Transforming Coagulation Testing: The Role of Biosensors in Prothrombin Time (PT) Measurement.ACS omega · 2026Review
- Inverse Lithography Technology (ILT) Under Chip Manufacture Context.Micromachines · 2026Review
- Electropolymerization of Organic Mixed Ionic-Electronic Conductors: Fundamentals and Applications in Bioelectronics.Chemical reviews · 2026Review
- Low-Cost Maskless Photolithography Using an LCD-3D Printer for Microelectronic Devices.Small methods · 2025Article
- Chemistry, Properties, and Patterning of Transparent and Conductive Materials.The journal of physical chemistry. C, Nanomaterials and interfaces · 2025Review
- A Review: Grating Encoder Technologies for Multi-Degree-of-Freedom Spatial Measurement.Sensors (Basel, Switzerland) · 2025Review
- Vapor Deposition of Polymer Structures: From 2D Surface Coatings and Surface Microstructures to 3D Building Blocks and Structural Monoliths.Macromolecular rapid communications · 2025Review
- Nanofabrication of all-dielectric metasurfaces through pulsed thermal scanning probe lithography.Scientific reports · 2025Article
- Performance of Nanotechnology in Cementitious Materials: Synthesis and Application.Materials (Basel, Switzerland) · 2025Review
- Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance.RSC advances · 2025Article
- Tissue-like multicellular development triggered by mechanical compression in archaea.Science (New York, N.Y.) · 2025Article
- Micropillars in Cell Mechanobiology: Design, Fabrication, Characterization, and Biosensing Applications.Small science · 2025Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
7 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
In this era, electronic devices such as mobile phones, computers, laptops, sensors, and many more have become a necessity in healthcare, for a pleasant lifestyle, and for carrying out tasks quickly and easily. Different types of temperature sensors, biosensors, photosensors, etc., have been developed to meet the necessities of people. All these devices have chips inside them fabricated using diodes, transistors, logic gates, and ICs. The patterning of the substrate which is used for the further development of these devices is done with the help of a technique known as lithography. In the present work, we have carried out a review on different types of lithographic techniques such as optical lithography, extreme ultraviolet lithography, electron beam lithography, X-ray lithography, and ion beam lithography. The evolution of these techniques with time and their application in device fabrication are discussed. The different exposure tools developed in the past decade to enhance the resolution of these devices are also discussed. Chemically amplified and non-chemically amplified resists with their bonding and thickness are discussed. Mask and maskless lithography techniques are discussed along with their merits and demerits. Device fabrication at micro and nano scale has been discussed. Advancements that can be made to improve the performance of these techniques are also suggested.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.