ArticleMicromachines2022
Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
6 citing papers in PubMed, 16 citations in OpenAlex.
- Determination of Main Bearing Dynamic Clearance in a Shield Tunneling Machine Through a Broadband PMUT Array with a Decreased Blind Area and High Accuracy.Sensors (Basel, Switzerland) · 2025Article
- Coil-Only High-Frequency Lamb Wave Generation in Nickel Sheets.Sensors (Basel, Switzerland) · 2024Article
- Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films.Micromachines · 2024Article
- Multi-Transduction-Mechanism Technology, an Emerging Approach to Enhance Sensor Performance.Sensors (Basel, Switzerland) · 2023Review
- Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders.Micromachines · 2023Review
- PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm.Micromachines · 2022Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
7 authors at 1 institution in 1 country.
Funding
Abstract
A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.