Evidence map›Paper›PMID 36014203›Full record

ArticleMicromachines2022

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer.

Heng Liu, Yu Zhang, Jiale Wu

Abstract read
In one paragraph

Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

3 authors.

Heng LiuSchool of Electronic & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China.
Yu ZhangSchool of Electronic & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China.
Jiale WuSchool of Electronic & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China.

Funding

National Key Research and Development Program 2019YFC1804704
6 · The paper itself

Abstract

In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained. The sensitivity can be increased by increasing the detection proof mass and the area facing the detection capacitor plate and by decreasing the stiffness of the fold beams and the initial distance between the plate capacitors. Sensitivity is also related to the detection voltage: the larger the detection voltage, the greater the sensitivity. The dynamic equation of the closed-loop self-excited drive of the accelerometer is established, and the steady-state equilibrium point of the vibration amplitude and the stability condition are obtained using the average period method. Under the constraint conditions of the PI controller, when the loading acceleration changes, the vibration amplitude is related to the reference voltage and the pre-conversion coefficient of the interface circuit and has nothing to do with the quality factor. When the loading voltage is 2 V, the sensitivity is 321 Hz/g. Three Allan variance analysis methods are used to obtain the frequency deviation of 0.04 Hz and the amplitude deviation of 0.06 mVwithin 30 min at room temperature. When the temperature error in the incubator is ±0.01 °C, the frequency deviation decreases to 0.02 Hz, and the resolution is 56ug. The fully overlapping Allan variance analysis method (FOAV) requires a large amount of data and takes a long time to implement but has the most accurate stabilityof the three methods.

Indexed as

Allan variancefrequency stabilityresonant accelerometerself-excited oscillationsensitivity

Identifiers

PMID36014203
PMCPMC9416272

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.