ArticleMicromachines2022
Q-Factor Enhancement of Coupling Bragg and Local Resonance Band Gaps in Single-Phase Phononic Crystals for TPOS MEMS Resonator.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
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Who cites it
4 citing papers in PubMed.
- High responsivity IR sensing based on reflectometric RF MEMS.Nature communications · 2026Article
- Multi-Material Radial Phononic Crystals to Improve the Quality Factor of Piezoelectric MEMS Resonators.Micromachines · 2023Article
- Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator.Micromachines · 2023Article
- H-Shaped Radial Phononic Crystal for High-Quality Factor on Lamb Wave Resonators.Sensors (Basel, Switzerland) · 2023Article
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5 authors.
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Abstract
This paper presents a type of single-phase double "I" hole phononic crystal (DIH-PnC) structure, which is formed by vertically intersecting double "I" holes. By using the finite element method, the complex energy band curve, special point mode shapes, and different delay lines were calculated. Numerical results showed that DIH-PnC yielded ultra-wide band gaps with strong attenuation. The formation mechanism is attributed to the Bragg-coupled local resonance mechanism. The effects of the pore width in DIH-PnC on the band gaps were further explored numerically. Significantly, as the pore width variable, the position of the local resonance natural frequency could be modulated, and this enabled the coupling between the local resonance and the Bragg mechanism. Subsequently, we introduced this DIH-PnC into the thin-film piezoelectric-on-silicon (TPOS) resonator. The results illustrated that the anchor loss quality factor (Qanc) of the DIH-PnC resonator was 20,425.1% higher than that of the conventional resonator and 3762.3% higher than the Qanc of the cross-like holey PnC resonator. In addition, the effect of periodic array numbers on Qanc was researched. When the Qanc reached 1.12 × 10
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