ArticleMicromachines2022
Combination of Micro-Corrugation Process and Pre-Stretched Method for Highly Stretchable Vertical Wavy Structured Metal Interconnects.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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2 citing papers in PubMed.
- Soft and Conductive Polyethylene Glycol Hydrogel Electrodes for Electrocardiogram Monitoring.Gels (Basel, Switzerland) · 2023Article
- A Study on the 3D Deformation Behavior of Porous PDMS Flexible Electronic Composite Films Stretched under Different Temperatures.Materials (Basel, Switzerland) · 2023Article
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4 authors.
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Abstract
Metal interconnects with a vertical wavy structure have been studied to realize high-density and low-electric-resistance stretchable interconnects. This study proposed a new method for fabricating vertical wavy structured metal interconnects that comprises the pre-stretch method and the micro-corrugation process. The pre-stretch method is a conventional method in which a metal film is placed on a pre-stretched substrate, and a vertical wavy structure is formed using the return force of the substrate. The micro-corrugation process is a recent method in which a metal foil is bent vertically and continuously using micro-gears. In the proposed method, the pitch of the vertical wavy structured interconnect fabricated using the micro-corrugation process is significantly narrowed using the restoring force of the pre-stretched substrate, with stretchability improvement of up to 165%, which is significantly higher than that of conventional vertical wavy structured metal interconnects. The electrical resistance of the fabricated interconnect was low (120-160 mΩ) and stable (±2 mΩ or less) until breakage by strain. In addition, the fabricated interconnect exhibits durability of more than 6500 times in a 30% strain cycle test.
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