ArticleNano letters2022
MEMS Tunable Metasurfaces Based on Gap Plasmon or Fabry-Pérot Resonances.
Article in Nano letters, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
7 citing papers in PubMed.
- Electrically Tunable Meta-Waveplate Enabled by SbMicromachines · 2026Article
- Electrically Reconfigurable Quasi-BIC Metadevices Enabled by Integrated Barium Titanate.Nanophotonics (Berlin, Germany) · 2026Article
- Deep Learning-Assisted SERS for Therapeutic Drug Monitoring of Clozapine in Serum on Plasmonic Metasurfaces.Nano letters · 2025Article
- MEMS-metasurface-enabled mode-switchable vortex lasers.Science advances · 2024Article
- Electrically tunable topological phase transition in non-Hermitian optical MEMS metasurfaces.Science advances · 2024Article
- Recent Advances in Tunable Metasurfaces and Their Application in Optics.Nanomaterials (Basel, Switzerland) · 2023Review
- Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength.Microsystems & nanoengineering · 2023Article
Corrections and comments
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Tunable metasurfaces promise to enable adaptive optical systems with complex functionalities. Among possible realizations, a recent platform combining microelectromechanical systems (MEMS) with gap-surface plasmon (GSP) metasurfaces offers high modulation efficiency, broadband operation, and fast response. We compare tunable metasurfaces operating in GSP and Fabry-Pérot (FP) regions by investigating polarization-independent blazed gratings both numerically and experimentally. Peak efficiency is calculated to be ∼75% in both cases (∼40% in measurements), while the operation bandwidth is found larger when operating in the GSP region. Advantages of operating in the FP region include relaxed assembly requirements and operation tolerances. Additionally, simulation and experimental results show that coupling between neighboring unit cells increases for larger air gaps, resulting in deteriorated efficiency. We believe the presented analysis provides important guidelines for designing tunable metasurfaces for diverse applications in miniaturized adaptive optical systems.
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