Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires' Morphology in In Situ TEM.

Ya Shen, Xuechun Zhao, Ruiling Gong, Eric Ngo, Jean-Luc Maurice, Pere Roca I Cabarrocas, Wanghua Chen

Abstract read

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Article in Materials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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1citing papers in PubMed

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1 citing paper in PubMed.

Protection of Si Nanowires against AMolecules (Basel, Switzerland) · 2024
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Authors and funding

7 authors.

Ya ShenSchool of Physical Science and Technology, Ningbo University, Ningbo 315211, China.

Xuechun ZhaoSchool of Physical Science and Technology, Ningbo University, Ningbo 315211, China.

Ruiling GongSchool of Physical Science and Technology, Ningbo University, Ningbo 315211, China.

Eric NgoLaboratoire de Physique des Interfaces et des Couches Minces (LPICM), Centre National de la Recherche Scientifique (CNRS), Ecole Polytechnique, Institut Polytechnique de Paris, 91128 Palaiseau, France.

Jean-Luc MauriceLaboratoire de Physique des Interfaces et des Couches Minces (LPICM), Centre National de la Recherche Scientifique (CNRS), Ecole Polytechnique, Institut Polytechnique de Paris, 91128 Palaiseau, France.ORCID 0000-0002-5005-7174

Pere Roca I CabarrocasLaboratoire de Physique des Interfaces et des Couches Minces (LPICM), Centre National de la Recherche Scientifique (CNRS), Ecole Polytechnique, Institut Polytechnique de Paris, 91128 Palaiseau, France.ORCID 0000-0003-2241-2762

Wanghua ChenSchool of Physical Science and Technology, Ningbo University, Ningbo 315211, China.ORCID 0000-0001-6167-3178

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

We used in situ transmission electron microscopy (TEM) to observe the dynamic changes of Si nanowires under electron beam irradiation. We found evidence of structural evolutions under TEM observation due to a combination of electron beam and thermal effects. Two types of heating holders were used: a carbon membrane, and a silicon nitride membrane. Different evolution of Si nanowires on these membranes was observed. Regarding the heating of Si nanowires on a C membrane at 800 °C and above, a serious degradation dependent on the diameter of the Si nanowire was observed under the electron beam, with the formation of Si carbide. When the membrane was changed to Si nitride, a reversible sectioning and welding of the Si nanowire was observed.

Indexed as

electron beam irradiationgrowthsilicon nanowireTEM

Identifiers

PMID35955179

DOI10.3390/ma15155244

PMCPMC9369465

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