ArticleNanomaterials (Basel, Switzerland)2022
Effect of Annealing Temperature on Electrical Properties of ZTO Thin-Film Transistors.
Article in Nanomaterials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Fabrication and Electrical Characterization of MgZnO/ZTO Thin-Film Transistors.Nanomaterials (Basel, Switzerland) · 2025Article
- Electrical Performance of ZTO Thin-Film Transistors and Inverters.Micromachines · 2025Article
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Authors and funding
10 authors.
Funding
Abstract
A high-performance ZnSnO (ZTO) thin-film transistor (TFT) was fabricated, with ZTO deposited by rf magnetron sputtering. XPS was used to analyze and study the effects of different annealing temperatures on the element composition and valence state of ZTO films. Then, the influence mechanism of annealing treatment on the electrical properties of ZTO thin films was analyzed. The results show that, with an increase in annealing temperature, the amount of metal bonding with oxygen increases first and then decreases, while the oxygen vacancy decreases first and then increases. Further analysis on the ratio of Sn
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