ArticleMicrosystems & nanoengineering2022
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties.
Article in Microsystems & nanoengineering, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
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Who cites it
6 citing papers in PubMed.
- Design and Development of ScMicromachines · 2026Article
- Multiphysics optomechanical sensing of a liquid on the micron scale.Microsystems & nanoengineering · 2026Article
- A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring.Micromachines · 2023Article
- Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer.Micromachines · 2023Article
- A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications.Microsystems & nanoengineering · 2023Article
- Thin-film PMUTs: a review of over 40 years of research.Microsystems & nanoengineering · 2023Review
Corrections and comments
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Authors and funding
5 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monolithically fabricated with a 130 nm complementary metal-oxide semiconductor (CMOS) process. The electrode configuration allows the entire system to be implemented in a single device, where one electrode is used as an input and the other as an output. Experimental verification was carried out by exploiting the features of piezoelectric devices such as resonators and acoustic transducers, where a frequency shift and amplitude variation are expected because of a change in density and viscosity. A sensitivity of 482 ± 14 Hz/kg/m
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.