Evidence map›Paper›PMID 35744513›Full record

ArticleMicromachines2022

Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process.

Quanquan Sun, Jiaxuan Tang, Lifeng Shen, Jie Lan, Zhenfeng Shen, Junfeng Xiao, Xiao Chen, Jianguo Zhang, Yu Wu, Jianfeng Xu and 1 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

11 authors.

Quanquan SunShanghai Aerospace Control Technology Institute, Shanghai 201109, China.ORCID 0000-0002-7361-2847
Jiaxuan TangState Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Lifeng ShenShanghai Aerospace Control Technology Institute, Shanghai 201109, China.
Jie LanShanghai Aerospace Control Technology Institute, Shanghai 201109, China.
Zhenfeng ShenShanghai Aerospace Control Technology Institute, Shanghai 201109, China.
Junfeng XiaoState Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.ORCID 0000-0002-8057-7429
Xiao ChenSchool of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China.
Jianguo ZhangState Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Yu WuState Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Jianfeng XuState Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Xuefang WangState Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.

Funding

Shanghai Sailing Program 19YF1420100
6 · The paper itself

Abstract

In this paper, a high-precision, low-cost, batch processing nanoimprint method is proposed to process a spherical microlens array (MLA). The nanoimprint mold with high surface precision and low surface roughness was fabricated by single-point diamond turning. The anti-sticking treatment of the mold was carried out by perfluorooctyl phosphoric acid (PFOPA) liquid deposition. Through the orthogonal experiment of hot embossing with the treated mold and subsequent inductively coupled plasma (ICP) etching, the microstructure of MLA was transferred to the silicon substrate, with a root mean square error of 17.7 nm and a roughness of 12.1 nm Sa. The average fitted radius of the microlens array units is 406.145 µm, which is 1.54% different from the design radius.

Indexed as

hot embossingICP etchingmold anti-stickingsilicon spherical microlens array

Identifiers

PMID35744513
PMCPMC9228423

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.