ArticleSensors (Basel, Switzerland)2022
Detection of Volatile Organic Compounds by Using MEMS Sensors.
Article in Sensors (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed, 22 citations in OpenAlex.
- Review
- Electromechanical Impedance Response in CMUT-Based Gas Sensors Exposed to Volatile Organic Compounds.Sensors (Basel, Switzerland) · 2026Article
- Bifurcation-based wide-range vacuum pressure micro-sensor.Scientific reports · 2025Article
- Advances in MEMS, Optical MEMS, and Nanophotonics Technologies for Volatile Organic Compound Detection and Applications.Small science · 2025Review
- Design of Acetaldehyde Gas Sensor Based on Piezoelectric Multilayer Microelectromechanical System Resonator.Micromachines · 2024Article
- Unraveling the nature of sensing in electrostatic MEMS gas sensors.Microsystems & nanoengineering · 2024Article
- Wearable Device for Cumulative Chlorobenzene Detection and Accessible Mitigation Strategies.Sensors (Basel, Switzerland) · 2023Article
- A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications.Sensors (Basel, Switzerland) · 2023Article
Corrections and comments
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Authors and funding
10 authors at 3 institutions in 3 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively detect formaldehyde in the presence of benzene, a closely related interferent. Toward that end, we investigate the sensitivity and selectivity of two detector polymers-polyaniline (PANI) and poly (2,5-dimethyl aniline) (P25DMA)-to both gases. A semiautomatic method is developed to functionalize individual sensors and sensor arrays with the detector polymers. We found that the sensor array can selectively sense 1 ppm of formaldehyde in the presence of benzene.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.